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Helios NanoLab 600 DualBeam

eagle-i ID

Resource Type

  1. Scanning electron microscope


  1. Resource Description
    The Helios NanoLab™ 600 is equipped with an extremely high resolution Elstar™ electron column with a Field Emmission Gun (FEG) electron source. It is capable of <1nm @ 15kV and <2.5nm at 1kV electron beam resolution. The Ga+ ion source can image and machine down to 5nm resolution levels. Adding to the imaging and sputtering capabilities are a light element X-ray EDS detector and an electron back scatter diffraction orientation imaging camera. The OmniProbe AutoProbe™ 200 in-situ sample lift-out system allows the preparation of site specific TEM samples without the need for support films. This is necessary to fully utilize the high resolution capability of modern TEMs such as the Titan. The combined sputtering and imaging and analytical capability makes DualBeam FIBs extremely versatile and a key component in a world class nano-characterization facility.
  2. Additional Name
    Helios NanoLab 600 DualBeam, formerly produced by FEI
  3. Contact
    Center for Electron Microscopy and Analysis (CEMAS) Requests
  4. Access Restriction(s)
    Access hours & Scheduling: Must schedule time in advance to use resource or with specific hours.
  5. Access Restriction(s)
    Cost: Access is available at a set cost to others.
  6. Part of Collection
    Office of Research Collection
  7. Part of Collection
    Institute for Material Research
  8. Location
    Center for Electron Microscopy and Analysis (CEMAS)
Provenance Metadata About This Resource Record
  1. workflow state
  2. contributor
    schen (sadie chen)
  3. created
  4. creator
    schen (sadie chen)
  5. modified