eagle-i The Ohio State UniversityThe Ohio State University

ICP RIE, Trion

eagle-i ID


Resource Type

  1. Reactive ion etcher


  1. Resource Description
    ICP RIE, Trion
  2. Contact
    Denis Pelekhov
  3. Website(s)
  4. Part of Collection
    Office of Research Collection
  5. Part of Collection
    Institute for Material Research
  6. Location
    Nanosystems Laboratory
Provenance Metadata About This Resource Record

    Copyright © 2016 by the President and Fellows of Harvard College
    The eagle-i Consortium is supported by NIH Grant #5U24RR029825-02 / Copyright 2016