Maskless Pattern Generator, Heidelberg

eagle-i ID

http://eagle-i.rf.ohio-state.edu/i/00000174-6dff-2b28-b8fb-15ae80000000

Resource Type

  1. Instrument

Properties

  1. Resource Description
    Maskless Pattern Generator, Heidelberg
  2. Contact
    Denis Pelekhov
  3. Part of Collection
    Office of Research Collection
  4. Part of Collection
    Institute for Material Research
  5. Location
    Nanosystems Laboratory
 
RDFRDF
 
Provenance Metadata About This Resource Record