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Maskless Pattern Generator, Heidelberg

eagle-i ID

http://eagle-i.rf.ohio-state.edu/i/00000174-6dff-2b28-b8fb-15ae80000000

Resource Type

  1. Instrument

Properties

  1. Resource Description
    Maskless Pattern Generator, Heidelberg
  2. Contact
    Denis Pelekhov
  3. Location
    Nanosystems Laboratory
 
RDFRDF
 
Provenance Metadata About This Resource Record
  1. workflow state
    Published
  2. contributor
    schen (sadie chen)
  3. created
    2020-09-08T09:55:00.923-04:00
  4. creator
    schen (sadie chen)
  5. modified
    2020-09-08T09:55:03.903-04:00