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Metalorganic Chemical Vapor Deposition - Epitaxial Layer Deposition

eagle-i ID

http://eagle-i.rf.ohio-state.edu/i/00000174-b6d7-f5f1-b8fb-15ae80000000

Resource Type

  1. Material processing service

Properties

  1. Resource Description
    Metalorganic Chemical Vapor Deposition - Epitaxial Layer Deposition
  2. Additional Name
    Epitaxial Layer Deposition
  3. Service Provided by
    Nanotech West Lab
  4. Part of Collection
    Office of Research Collection
  5. Part of Collection
    Institute for Material Research
 
RDFRDF
 
Provenance Metadata About This Resource Record
  1. workflow state
    Published
  2. contributor
    schen (sadie chen)
  3. created
    2020-09-22T13:24:25.155-04:00
  4. creator
    schen (sadie chen)
  5. modified
    2020-09-22T13:24:27.321-04:00