eagle-i
 
The Ohio State UniversityThe Ohio State University

Vistec EBPG5000

eagle-i ID

http://eagle-i.rf.ohio-state.edu/i/00000174-b6e3-9d9a-b8fb-15ae80000000

Resource Type

  1. Electron beam lithography system

Properties

  1. Resource Description
    Vistec EBPG5000
  2. Additional Name
    Electron Beam Lithography
  3. Contact
    Nantech West Lab
  4. Part of Collection
    Office of Research Collection
  5. Part of Collection
    Institute for Material Research
  6. Location
    Nanotech West Lab
 
RDFRDF
 
Inferred Types from the eagle-i Ontology (What is an ontology?)
Provenance Metadata About This Resource Record

    eagle-i_footer facebook-blue twitter-blue
    eagle-i Home
    Institution Home
    View only Core Laboratories
    View only Laboratories
    View All Resource Providers
    SWEET
    Copyright © 2016 by the President and Fellows of Harvard College
    The eagle-i Consortium is supported by NIH Grant #5U24RR029825-02 / Copyright 2016