eagle-i
 
The Ohio State UniversityThe Ohio State University

Vistec EBPG5000

eagle-i ID

http://eagle-i.rf.ohio-state.edu/i/00000174-b6e3-9d9a-b8fb-15ae80000000

Resource Type

  1. Electron beam lithography system

Properties

  1. Resource Description
    Vistec EBPG5000
  2. Additional Name
    Electron Beam Lithography
  3. Contact
    Nantech West Lab
  4. Website(s)
    http://nanotech.osu.edu/
  5. Part of Collection
    Office of Research Collection
  6. Part of Collection
    Institute for Material Research
  7. Location
    Nanotech West Lab
 
RDFRDF
 
Inferred Types from the eagle-i Ontology (What is an ontology?)
Provenance Metadata About This Resource Record

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