Vistec EBPG5000
eagle-i ID
http://eagle-i.rf.ohio-state.edu/i/00000174-b6e3-9d9a-b8fb-15ae80000000
Resource Type
Properties
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Resource Description
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Vistec EBPG5000
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Additional Name
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Electron Beam Lithography
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Contact
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Nantech West Lab
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Website(s)
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http://nanotech.osu.edu/
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Part of Collection
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Office of Research Collection
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Part of Collection
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Institute for Material Research
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Location
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Nanotech West Lab
