eagle-i The Ohio State UniversityThe Ohio State University

Vistec EBPG5000

eagle-i ID


Resource Type

  1. Electron beam lithography system


  1. Resource Description
    Vistec EBPG5000
  2. Additional Name
    Electron Beam Lithography
  3. Contact
    Nantech West Lab
  4. Website(s)
  5. Part of Collection
    Office of Research Collection
  6. Part of Collection
    Institute for Material Research
  7. Location
    Nanotech West Lab
Provenance Metadata About This Resource Record

    Copyright © 2016 by the President and Fellows of Harvard College
    The eagle-i Consortium is supported by NIH Grant #5U24RR029825-02 / Copyright 2016