eagle-i The Ohio State UniversityThe Ohio State University

Picosun SUNALE R-150B

eagle-i ID

http://eagle-i.rf.ohio-state.edu/i/00000174-b6e4-5a78-b8fb-15ae80000000

Resource Type

  1. Atomic layer deposition system

Properties

  1. Resource Description
    Picosun SUNALE R-150B
  2. Additional Name
    Atomic Layer Deposition System
  3. Additional Name
    Picosun SUNALE R-150B
  4. Contact
    Nantech West Lab
  5. Website(s)
    http://nanotech.osu.edu/
  6. Part of Collection
    Office of Research Collection
  7. Part of Collection
    Institute for Material Research
  8. Location
    Nanotech West Lab
 
RDFRDF
 
Provenance Metadata About This Resource Record

    Copyright © 2016 by the President and Fellows of Harvard College
    The eagle-i Consortium is supported by NIH Grant #5U24RR029825-02 / Copyright 2016