This page is a preview of the following resource. Continue onto eagle-i search using the button on the right to see the full record.

Picosun SUNALE R-150B

eagle-i ID

Resource Type

  1. Atomic layer deposition system


  1. Resource Description
    Picosun SUNALE R-150B
  2. Additional Name
    Atomic Layer Deposition System
  3. Additional Name
    Picosun SUNALE R-150B
  4. Contact
    Nantech West Lab
  5. Part of Collection
    Office of Research Collection
  6. Part of Collection
    Institute for Material Research
  7. Location
    Nanotech West Lab
Provenance Metadata About This Resource Record
  1. workflow state
  2. contributor
    schen (sadie chen)
  3. created
  4. creator
    schen (sadie chen)
  5. modified