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Plasma Therm SLR770 ICP RIE

eagle-i ID

http://eagle-i.rf.ohio-state.edu/i/00000174-b6e5-4b92-b8fb-15ae80000000

Resource Type

  1. Plasma etcher

Properties

  1. Resource Description
    Plasma Therm SLR770 ICP RIE
  2. Additional Name
    Plasma etcher
  3. Contact
    Nantech West Lab
  4. Part of Collection
    Office of Research Collection
  5. Part of Collection
    Institute for Material Research
  6. Location
    Nanotech West Lab
 
RDFRDF
 
Provenance Metadata About This Resource Record
  1. workflow state
    Published
  2. contributor
    schen (sadie chen)
  3. created
    2020-09-22T13:39:04.161-04:00
  4. creator
    schen (sadie chen)
  5. modified
    2020-09-22T13:39:06.835-04:00