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Plasma Therm SLR770 ICP RIE

eagle-i ID

Resource Type

  1. Plasma etcher


  1. Resource Description
    Plasma Therm SLR770 ICP RIE
  2. Additional Name
    Plasma etcher
  3. Contact
    Nantech West Lab
  4. Part of Collection
    Office of Research Collection
  5. Part of Collection
    Institute for Material Research
  6. Location
    Nanotech West Lab
Provenance Metadata About This Resource Record
  1. workflow state
  2. contributor
    schen (sadie chen)
  3. created
  4. creator
    schen (sadie chen)
  5. modified