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The Ohio State UniversityThe Ohio State University

AJA Orion RF/DC Sputter System

eagle-i ID

http://eagle-i.rf.ohio-state.edu/i/00000174-b6e5-eef8-b8fb-15ae80000000

Resource Type

  1. Instrument

Properties

  1. Resource Description
    AJA Orion RF/DC Sputter System
  2. Additional Name
    Thin film deposition
  3. Contact
    Nantech West Lab
  4. Part of Collection
    Office of Research Collection
  5. Part of Collection
    Institute for Material Research
  6. Location
    Nanotech West Lab
 
RDFRDF
 
Inferred Types from the eagle-i Ontology (What is an ontology?)
Provenance Metadata About This Resource Record

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