AJA Orion RF/DC Sputter System

eagle-i ID

Resource Type

Properties

1. Resource Description

   AJA Orion RF/DC Sputter System

2. Additional Name

   Thin film deposition

3. Contact

   Nantech West Lab

4. Website(s)

   http://nanotech.osu.edu/

5. Part of Collection

   Office of Research Collection

6. Part of Collection

   Institute for Material Research

7. Location

   Nanotech West Lab