eagle-i The Ohio State UniversityThe Ohio State University

GCA 6100C Stepper (I-line)

eagle-i ID

http://eagle-i.rf.ohio-state.edu/i/00000174-b6e6-c62b-b8fb-15ae80000000

Resource Type

  1. Instrument

Properties

  1. Resource Description
    GCA 6100C Stepper (I-line)
  2. Additional Name
    Photolithography
  3. Contact
    Nantech West Lab
  4. Part of Collection
    Office of Research Collection
  5. Part of Collection
    Institute for Material Research
  6. Location
    Nanotech West Lab
 
RDFRDF
 
Provenance Metadata About This Resource Record

    Copyright © 2016 by the President and Fellows of Harvard College
    The eagle-i Consortium is supported by NIH Grant #5U24RR029825-02 / Copyright 2016