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Aixtron 3x2" Metal Organic Chemical Vapor Deposition System

eagle-i ID

http://eagle-i.rf.ohio-state.edu/i/00000174-b6e8-1728-b8fb-15ae80000000

Resource Type

  1. Instrument

Properties

  1. Resource Description
    Aixtron 3x2" Metal Organic Chemical Vapor Deposition System
  2. Additional Name
    Semiconductor Epitaxy (Arsenide/Phosphide)
  3. Contact
    Nantech West Lab
  4. Part of Collection
    Office of Research Collection
  5. Part of Collection
    Institute for Material Research
  6. Location
    Nanotech West Lab
 
RDFRDF
 
Provenance Metadata About This Resource Record