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Agnitron Agilis Metal Organic Chemical Vapor Deposition System

eagle-i ID

http://eagle-i.rf.ohio-state.edu/i/00000174-b6ef-433f-b8fb-15ae80000000

Resource Type

  1. Chemical vapor deposition system

Properties

  1. Resource Description
    Agnitron Agilis Metal Organic Chemical Vapor Deposition System
  2. Additional Name
    Semiconductor Epitaxy (Oxide)
  3. Contact
    Nantech West Lab
  4. Part of Collection
    Office of Research Collection
  5. Part of Collection
    Institute for Material Research
  6. Location
    Nanotech West Lab
 
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Provenance Metadata About This Resource Record

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