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The Ohio State UniversityThe Ohio State University

Heidelberg MLA150 maskless aligner

eagle-i ID

http://eagle-i.rf.ohio-state.edu/i/00000174-b6ef-c490-b8fb-15ae80000000

Resource Type

  1. Instrument

Properties

  1. Resource Description
    Heidelberg MLA150 maskless aligner
  2. Additional Name
    Photolithography
  3. Additional Name
    maskless aligner
  4. Contact
    Nantech West Lab
  5. Part of Collection
    Office of Research Collection
  6. Part of Collection
    Institute for Material Research
  7. Location
    Nanotech West Lab
 
RDFRDF
 
Inferred Types from the eagle-i Ontology (What is an ontology?)
Provenance Metadata About This Resource Record

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