Heidelberg MLA150 maskless aligner

eagle-i ID

Resource Type

Properties

1. Resource Description

   Heidelberg MLA150 maskless aligner

2. Additional Name

   Photolithography

3. Additional Name

   maskless aligner

4. Contact

   Nantech West Lab

5. Website(s)

   http://nanotech.osu.edu/

6. Part of Collection

   Office of Research Collection

7. Part of Collection

   Institute for Material Research

8. Location

   Nanotech West Lab