This page is a preview of the following resource. Continue onto eagle-i search using the button on the right to see the full record.

Clean room for optical/e-beam lithography processing

eagle-i ID

http://eagle-i.rf.ohio-state.edu/i/00000174-ea4a-f5ef-b8fb-15ae80000000

Resource Type

  1. Access service

Properties

  1. Resource Description
    Clean room for optical/e-beam lithography processing
  2. Additional Name
    Clean room
  3. Additional Name
    Facility
  4. Service Provided by
    Nanosystems Laboratory
  5. Part of Collection
    Office of Research Collection
  6. Part of Collection
    Institute for Material Research
 
RDFRDF
 
Provenance Metadata About This Resource Record