eagle-i The Ohio State UniversityThe Ohio State University

Clean room for optical/e-beam lithography processing

eagle-i ID

http://eagle-i.rf.ohio-state.edu/i/00000174-ea4a-f5ef-b8fb-15ae80000000

Resource Type

  1. Access service

Properties

  1. Resource Description
    Clean room for optical/e-beam lithography processing
  2. Additional Name
    Clean room
  3. Additional Name
    Facility
  4. Service Provided by
    Nanosystems Laboratory
  5. Website(s)
    http://nsl.osu.edu/
  6. Part of Collection
    Office of Research Collection
  7. Part of Collection
    Institute for Material Research
 
RDFRDF
 
Provenance Metadata About This Resource Record

    Copyright © 2016 by the President and Fellows of Harvard College
    The eagle-i Consortium is supported by NIH Grant #5U24RR029825-02 / Copyright 2016