eagle-i The Ohio State UniversityThe Ohio State University

Clean room for optical/e-beam lithography processing

eagle-i ID

http://eagle-i.rf.ohio-state.edu/i/00000174-ea4a-f5ef-b8fb-15ae80000000

Resource Type

  1. Access service

Properties

  1. Resource Description
    Clean room for optical/e-beam lithography processing
  2. Additional Name
    Clean room
  3. Additional Name
    Facility
  4. Service Provided by
    Nanosystems Laboratory
  5. Part of Collection
    Office of Research Collection
  6. Part of Collection
    Institute for Material Research
 
RDFRDF
 
Provenance Metadata About This Resource Record

    Copyright © 2016 by the President and Fellows of Harvard College
    The eagle-i Consortium is supported by NIH Grant #5U24RR029825-02 / Copyright 2016