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Varian GENII MBE: Si/Ge semiconductor epitaxy system

eagle-i ID


Resource Type

  1. Instrument


  1. Resource Description
    Si/Ge semiconductor epitaxy system
  2. Additional Name
  3. Additional Name
  4. Contact
    Mark Brenner
  5. Access Restriction(s)
    Access Hours & Scheduling: Must schedule time in advance to use resource or within specific hours.
  6. Access Restriction(s)
    Cost: Access is available at a set cost to others.
  7. Access Restriction(s)
    Training: Access first requires completing an online or in person course.
  8. Website(s)
  9. Part of Collection
    Office of Research Collection
  10. Part of Collection
    Institute for Material Research
  11. Location
    Semiconductor Epitaxy and Analysis Laboratory (SEAL)
Provenance Metadata About This Resource Record

    Copyright © 2016 by the President and Fellows of Harvard College
    The eagle-i Consortium is supported by NIH Grant #5U24RR029825-02 / Copyright 2016