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The Ohio State UniversityThe Ohio State University

Electron Beam Lithography - Pattern Design and Device Processing

eagle-i ID

http://eagle-i.rf.ohio-state.edu/i/00000174-b6d7-59c7-b8fb-15ae80000000

Resource Type

  1. Material processing service

Properties

  1. Resource Description
    Electron Beam Lithography - Pattern Design and Device Processing
  2. Additional Name
    Pattern Design and Device Processing
  3. Service Provided by
    Nanotech West Lab
  4. Part of Collection
    Office of Research Collection
  5. Part of Collection
    Institute for Material Research
 
RDFRDF
 
Inferred Types from the eagle-i Ontology (What is an ontology?)
Provenance Metadata About This Resource Record

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